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产品类别- 元素分析 >>X射线光谱仪衍射仪 >>微束XRF >>
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MicroXR GXR/S 微束X射线荧光检测系统
The MicroXR GXR/S is ideal for microbeam XRF measurements that require higher sensitivities for RoHS applications and plating thickness measurements.
The MicroXR GXR/S system provides high resolution XRF measurements of Pb, Cd, Hg, total Cr and total Br levels where a small area analysis is required. The MicroXR GXR/S can be used to provide more precise XRF measurements for Pb and Cd, isolating the exact location desired for measurement. The MicroXR GXR/S provides a visual image of the sample which can be used to pinpoint measurement location, as well as provide the detailed image for historical documentation.

MicroXR benchtop platform is a configurable microbeam XRF film thickness and composition measuring tool. This platform includes several X-ray beam and detection options for application flexibility, and provides unparalleled performance in accuracy, precision and reproducibility.

  • Mechanical or optical X-ray beam collimation options
  • Proportional counter, PIN diode, SDD or Si(Li) X-ray detector options
  • Servo driven x-y-z stage with linear encoder option for accurate sample positioning
  • Measurement method in accordance with ASTM B 568/ISO3497

Application PerformanceThe MicroXR platform employs X-ray fluorescence technology in its electronics and software. Application performance specifications ensure that your microbeam XRF system is designed for your specific application and operational purposes:

  • Algorithms tools using empirical and fundamental parameters, non-standard and standard-corrected
  • Alloy analysis up to a total of 30 elements
  • Thickness and composition on one to five deposition layers and one substrate layer simultaneously, to a total of 30 elements per application
  • Relative mode calibration for measurement on recessed areas (focus independent)\
  • Absorption mode
  • Linear excitation mode
  • Immersion coating mode
  • Density and base correction
  • Electroless Ni thickness and composition analysis (optional)

Measurement PerformanceThe MicroXR platform is designed for unsurpassed accuracy and versatility, including several features to tailor the instrument to specific measurements:

  • Application and standards library
  • Automated programmable stage measurement
  • Automatic beam alignment
  • Multiplexed graphical and video signal for single screen operation
  • Point-and-shoot sample positioning
  • Computer-generated reticle with beam size indicator
  • Programmable icons with operator interface designer
  • Two- and three-dimensional mapping software
  • Full statistics package
  • Part number management system with optional bar code reader
Collimation : Mechanical
PIN Diode : Resolution <290eV
Stage Travel :

11.3" x 11.3" x 3.5"
28 x 28 x 12.5 cm

Stage/Encoder : Servo
Optics : Fixed 50x
Dimensions/Weight :
Width : 27.5" (70 cm)
Depth : 32.25" (82 cm)
Height : 23" (58.5 cm)
Weight : 200 lb (90 kg)
Sample Door Opening :

18" (w) x 12" (h)
(46 cm x 30 cm)

Chamber Dimensions :

28" x 24" x 33"
(70 cm x 60 cm x 84 cm)

Postal Mail:
  • MicroXR Benchtop Platform Specification Sheet
  • MicroXR Microbeam XRF Brochure