| The EX03 is an electron impact source primarily designed for sample cleaning in surface analysis experiments and is intended for use with inert gas species. Unlike the cold cathode type ion gun it can produce large currents without the inconvenience of stray magnetic fields.
Even etchingOne of the common requirements when cleaning samples is to have even etching across the entire surface. This is generally achieved by scanning small spot ion beams across the surface. The EX03 design can produce a flat beam profile with only small variations in current density across the beam, thus giving a low cost alternative for even sample etching.
Energy rangeThe energy range of the gun is 300 eV to 3 keV and is constantly variable over the energy range. Direct gas input into the ion source allows for a lower system operating pressure than for guns requiring backfilling of the chamber. Typical pressures at 5 x 10-6 mbar are required to achieve target currents of >20mA, with no differential pumping required.
Long working distanceThe 100mm working distance avoids clashes with other instruments inside the vacuum chamber although the optic design and focussing allow an even etch profile to be achieved at a range of working distances.
Installation
The gun is mounted on a 70mm flange allowing it to be fitted to the majority of vacuum systems. Gas inlet is via a 34mm flange on the mounting flange. The excitation source is designed to give long filament lifetimes, with the service interval increased by the presence of two filaments. All electrical connections are made through a single electrical feedthrough situated on the mounting flange on the source.
Gas speciesAr, He, Ne, Kr, Xe |