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Theta Probe平行角分辨XPS微探针
Thermo's Theta Probe combines advanced monochromator and lens and detector technology to provide rapid, precise analysis. With the revolutionary ARXPS capability to provide angular data simultaneously without tilting the sample
High-performance XPS, Small Area XPS (SAXPS) and Unique Angle Resolved XPS (ARXPS) capabilitySmall Area XPS with the Microfocus Monochromator for maximum sensitivity Sample Alignment is fast and accurate using the advanced optical system  Elemental and chemical state mapping of surface features   70mm x 70mm sample stage for high throughput and sample thicknesses up to 25mm  Automation for unattended operation  Avantage Windows NT based data system  

The Theta Probe instrument combine advanced monochromator, lens and detector technology with the Avantage data system (Windows NT) to provide rapid, precise analysis.

Developed from the highly successful Sigma Probe, Theta Probe's revolutionary ARXPS capability provides angular data simultaneously collected without tilting the sample.