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产品类别- 微区分析和成像 >>表面分析 >>俄歇电子光谱仪(AES) >>
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MICROLAB 350 - Auger Electron Spectrometer
MICROLAB 350 is a high-performance, scanning Auger Electron Spectrometer (AES) with High Sensitivity and High Energy Resolution. SEM resolution <7 nm and Scanning Auger Mapping (SAM) resolution <12 nm.
High-performance scanning Auger electron spectrometer (AES)
  • Secondary Electron Mapping (SEM) at <7 nm Resolution             
  • Scanning Auger Mapping (SAM) at <12 nm Resolution             
  • High Sensitivity             
  • Spherical Sector Analyser Allows High Energy Resolution for: 
  • Chemical state determination 
  • Reflected Electron Energy Loss Spectroscopy (REELS) 
  • Measurement of dopants in silicon
  • Multitechnique Capability Including:   
  • X-ray photoelectron spectroscopy (XPS) 
  • Energy dispersive X-ray spectroscopy (EDX) 
  • Backscattered electron detection 
  • FIB
  • Preparation Facilities Including:
  • Fracture Stage           
  • Heating/Cooling Stage           
  • Evaporation Stage
    • Postal Mail:
  • MICROLAB 350 Literature Request